Cleanroom Assembly Services / Bonding

Cleanroom Assembly Services / Bonding

FM Industries, Inc. specializes in assembly, integration and testing of critical electro-mechanical assemblies in our class 10,000 cleanroom,.  A wide variety of products such as, chamber modules, throttle valves, cathodes, lid assemblies, dome temperature control units and electrostatic chucks are assembled and tested.  Cleanroom inspection capability includes dimensional, helium leak check, rate of rise, performance and functional testing.

Adjacent to the cleanroom assembly area is an additional class 10,000 cleanroom dedicated to Autoclave bonding.  Typical applications include bonding dissimilar materials using compliant, thermally conductive sheet adhesives.  Supporting equipment includes fully automated vacuum prebake ovens for out-gassing adhesives, cutter plotters for accurate material geometry and clean room ovens for post bond baking. Finished parts are thoroughly inspected for critical alignment, bond integrity and performance requirements.

Please contact us with any questions, and see below for additional details

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Portfolios

Cleanroom Assembly Services / Bonding Capabilities

General Capabilities
Electro-Mechanical Assembly
Integration
Autoclave Bonding
Testing
Assembly Service Cleanroom
Equipment
5000 ft² class 10,000 cleanroom
Helium Leak Testing
Class 1,000 Laminar flow Benches
Precision Layup
24" Vacuum Oven (fully automated)
Cleanroom Ovens
Taricco 3’ x 5’ autoclave
Thermal Equipment 3’ x 7’ autoclave
Assembled Products
Chamber Modules
Electrostatic Chuck (ESC)
Chamber Lids
Cathodes
Showerheads
Dome Temperature Control Units
Integration
Foreline
Valve
Pump Stack
Pneumatics
Lift Mechanism
Power Supply
Wire Harness
High Performance Ceramic
Mechanical
Throttle body
Bonding Fully Automated Autoclave
Sheet Material
Bonding Automation
Vacuum
Pressure
Temperature
Ramp Rate
Bonding Material Thermally Conductive Sheet
Similar and Dissimilar Materials
Materials Aluminum
Variety of Substrates
Size Envelope Max in Vessel - 30" Dia x 72" Long Typical - 24" x 24" x 4"
Maximum Pressure 200 PSI
Maximum Temperature 250 F
Additional Services Provided Testing
Testing
Automated
Helium Leak Detection
Hydrostatic
Strain
Stress
Thermal Conductivity
Bonding Testing
Dimensional SAM
Documentation
Operation Method Sheets (OMS) Checksheets
Process Routings  

 

Additional Information

Industry Focus Semiconductor
Industry Standards
ISO 9001:2008 ANSI, ASME
ISO 14000 SSQA
Efficiency
Six Sigma Certification - Green Belt
Lights Out Manufacturing
Lean Manufacturing
File Formats .DXF, .DWG, .SAT, .STP, .IPT, .IDW, .IGS, .PRT, IAM,

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FM Industries, Inc.