Thermal Sprayed Electrostatic Chuck Design and Manufacturing
FM Industries employs a dedicated R&D and engineering staff that is committed to providing each customer with individualized service and design to produce an electrostatic chuck (ESC) that suits their application. Our engineers work cooperatively with customers to provide an optimized total ESC solution for improved tool performance. Our proprietary manufacturing process enables FMI to fabricate ESCs from 100mm to 450mm with customer specified geometries. All ESCs feature high clamping forces, quick chuck and de-chuck times, and anti-arc design for high bias applications.
Our advanced technology gives customers clamping capability of a wide variety of materials that are not only conductive but also dielectric such as Glass and Sapphire. All ESCs are tested to fully meet customer specifications.
The table below outlines the capabilities of our ESCs. To learn more about our electrostatic chuck fabrication services, please feel free to contact us directly for additional information.
Thermal Sprayed Electrostatic Chuck Design and Manufacturing Capabilities
|Size & Geometry
||100mm-450mm; Custom design base plate|
||Anodize Aluminum, Alumina, DLC, Yttria, Stabilized Zirconia, Hybrid|
||Monopole, Bipole, Multi-pole, Interdigitated|
||Flat and parallel .0002 - .0004 inch |
||Wafer clamping surface 2µ inch |
||Custom mesa pattern to fit performance requirement|
|Inspection & Performance Testing
||Dimensional accuracy, Electrical performance,|
Backside gas leak, Vacuum integrity
||Thermal & Electrical Analysis, ESC Performance |
Characterization, SEM & EDX
Computational analysis using FEM & CFD
|Quality Control & Efficiency
||Statistical Process Control|
Process Of Record (POR)
ISO 9001:2008, Six Sigma Certification
||Single Prototype to High Volume|
Rapid Prototype for Quick Turnaround
||6 weeks and up for production parts|
HPD-CVD and PVD
Dielectric Substrates (LED and Solar Applications)
||Compliant to Major OEM Specifications
Available to import most software.
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